Thin-film deposition
principles and practice
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Word Count
154,000 words, Guess
Page Count
616 pages
Identifiers
- Open LibraryOL1120536M
- ISBN-100070585024
- OCLC Control Number31782845
- OCLC Control Numberthinfilmdepositi0000smit
- Library of Congress Control Number94047002
and 2 more
- Goodreads889347
- LibraryThing1646205
Classifications
- DDC621.3815/2
- LCCTA418.9.T45 S65 1995
Subjects
Topics
EpitaxiePlasma'sIngénierieThin filmsThin films.Dunne filmsVapor-platingVapor-plating.Couches mincesThin film devicesElektronenbundelsThin film devices.Depositie (scheikunde)Technologie industrielleChemical vapour depositionMateriais e dispositivos semicondutoresDeposicao de vapor (engenharia eletrica)
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