Contributions

  • Buehler, Martin G , joint author - Contributor
  • Institute for Applied Technology (U.S.). Electronic Technology Division - Contributor
  • United States. Defense Advanced Research Projects Agency - Contributor
  • United States. National Bureau of Standards - Contributor

Publication

1978 - Dept. of Commerce, National Bureau of Standards, Institute for Applied Technology Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off., Washington, District of Columbia

Language

English

Word Count

19,750 words, Guess

Page Count

79 pages

Identifiers

Subjects

Series Statement

  • Semiconductor measurement technology
  • NBS special publication ; 400-32

Other Editions

  • Microelectronic test pattern NBS-4Dept. of Commerce, National Bureau of Standards, Institute for Applied Technology Electronic Technology Division : for sale by the Supt. of Docs., U.S. Govt. Print. Off.1978-01-01

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