Advances in CMP/polishing technologies for the manufacture of electronic devices
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Publication
2012 - Elsevier, Oxford, England
Language
English
Word Count
79,250 words, Guess
Page Count
317 pages
Identifiers
- ISBN-101437778593
- ISBN-139781437778595
- Library of Congress Control Number2012359712
- OCLC Control Number740631119
- OCLC Control Number774290238
and 2 more
- Better World Books9781437778595
- Open LibraryOL25253810M
Classifications
- LCCTJ1280 .A38 2012
- LCCTJ1280
- LCCTJ1280 .A38 2012eb
Alternate Titles
- CMP polishing technologies for the manufacture of electronic devices
Description
CMP and polishing are the most precise processes used to finish the surfaces of mechanical and electronic or semiconductor components. --P. 4 of cover.
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