Microlithography 1999: Advances in Resist Technology and Processing XVI
Proceedings of Spie 15-17 March 1999 Santa Clara, California (Proceedings of SPIE)
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Word Count
350,500 words, Guess
Page Count
1,402 pages
Physical Format
Paperback
Identifiers
- Open LibraryOL11393142M
- ISBN-139780819431523
- ISBN-100819431524
- OCLC Control Number41792054
Classifications
- LCC
Subjects
Other Editions
- Microlithography 1999: Advances in Resist Technology and Processing XVI
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