Author

Contributions

  • Shivarova, A. - Contributor

Publication

1999 - Springer Netherlands, Dordrecht, Netherlands

Language

English

Word Count

142,250 words, Guess

Page Count

569 pages

Physical Format

Electronic resource

Identifiers

Classifications

  • DDC539.7092
  • LCCQC770-798
  • LCCQC702.7.H42
and 1 more
  • LCCQC793.5.H32-793.5.H329

Alternate Titles

  • Proceedings of the NATO Advanced Study Institute, Sozopol. Bulgaria, May 22-June 1, 1998

Description

This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It encompasses all the links in the progress from fundamentals to applications: the description and modelling of different plasma sources to technological use; from general diagnostics to methods related to technological control and operation of plasma reactors. The book lays a foundation for the application of sources in industry (in high-tech electronics, microelectronics, IC fabrication, plasma chemistry, lighting, new materials, optics, the biomedical industry, aerospace, etc.), and in astrophysics, atomic physics, laser physics, accelerator physics and microwave devices.

Subjects

Series Statement

  • NATO ASI Series, 3. High Technology -- 67

Links

Other Editions

  • Advanced Technologies Based on Wave and Beam Generated PlasmasElectronic resourceSpringer Netherlands1999-01-01

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