Micro process engineering
fundamentals, devices, fabrication, and applications
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Author
Contributions
- Kockmann, Norbert. - Contributor
Publication
2006 - Wiley-VCH, Weinheim, Germany
Language
English
Word Count
126,750 words, Guess
Page Count
507 pages
Identifiers
- ISBN-103527312463
- ISBN-139783527312467
- Goodreads689431
- LibraryThing5984562
- Library of Congress Control Number2006296404
and 2 more
- Better World Books9783527312467
- Open LibraryOL18260798M
Classifications
- LCCTS183 .M52 2006
- LCCTS176
Series Statement
- Advanced micro & nanosystems : -- 5.
Other Editions
- Micro process engineering: fundamentals, devices, fabrication, and applications
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