Author

Publication

1987 - Plenum Press, New York, New York (State)

Language

English

Word Count

167,500 words, Guess

Page Count

670 pages

Identifiers

and 2 more
  • LibraryThing8045870
  • Goodreads3731760

Classifications

  • DDC621.3815/2
  • LCCTK7871.15.G3 S55 1987

Subjects

Series Statement

  • Microdevices : physics and fabrication technologies

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