Optical Micro and Nanometrology in Microsystems Technology
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Page Count
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Physical Format
Hardcover
Identifiers
- ISBN-100819462446
- ISBN-139780819462442
- Goodreads5353920
- Library of Congress Control Number2007271570
- Better World Books9780819462442
and 1 more
- Open LibraryOL11393861M
Classifications
- LCCQC367.O589 2006
- LCCQC367 .O589 2006
- LCCTR692.5 .S66 v. 6188
Subjects
Other Editions
- Optical Micro and Nanometrology in Microsystems Technology
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