Microcircuit Engineering 91
Proceedings of the International Conference on Microlithography September 17-19, 1991 Rome, Italy
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Contributions
- A. Paroli (Editor) - Contributor
Publication
1992-03-01 - Elsevier Science Publishing Company
Language
English
Word Count
145,500 words, Guess
Page Count
582 pages
Physical Format
Hardcover
Identifiers
- Open LibraryOL10261308M
- ISBN-139780444895097
- ISBN-100444895094
- OCLC Control Number27013589
- Library of Congress Control Number92223247
Classifications
- LCCTK7874 .M453 1991
- DDC621.3815
Subjects
Topics
Other Editions
- Microcircuit Engineering 91
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