Characterization in silicon processing
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Author
Contributions
- Strausser, Yale. - Contributor
Publication
1993 - Butterworth-Heinemann, Boston, Massachusetts
Language
English
Word Count
60,000 words, Guess
Page Count
240 pages
Identifiers
- Open LibraryOL1413479M
- ISBN-100750691727
- OCLC Control Number53032668
- OCLC Control Number28221484
- OCLC Control Numbercharacterization00stra
and 2 more
- Library of Congress Control Number93022784
- Goodreads3529871
Classifications
- DDC620.1/93
- LCCQC611.8.S5 C48 1993
Subjects
Topics
SiliconSCIENCESilicon.SiliciumSiliconeChemistryInorganicSurface chemistrySurface chemistry.Electric conductorChimie des surfacesElectric conductorsSemiconductor filmsElectric conductors.Semiconductor films.Conducteurs électriquesCouches à semi-conducteurs
Series Statement
- Materials characterization series
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