Angular sensitivity of controlled implanted doping profiles
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Author
Contributions
- United States. National Bureau of Standards - Contributor
- United States. Defense Advanced Research Projects Agency - Contributor
Publication
1978 - Department of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., Washington, District of Columbia
Language
English
Word Count
13,500 words, Guess
Page Count
54 pages
Identifiers
- Open LibraryOL49940648M
- OCLC Control Number4482406
- Library of Congress Control Number78010624
Classifications
- LCCQC100 .U57 no. 400-49
Subjects
Series Statement
- NBS special publication -- 400-49
Other Editions
- Angular sensitivity of controlled implanted doping profiles
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