Ion implantation and plasma assisted processes
proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988
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Author
Contributions
- Hochman, Robert F. 1928- - Contributor
- Solnick-Legg, Hillary. - Contributor
- Legg, Keith O. - Contributor
- ASM International. Ion Implantation Committee. - Contributor
- ASM International. Plasma Processes Committee. - Contributor
Publication
1988 - Asm Intl, Metals Park, Ohio, Ohio
Language
English
Word Count
51,250 words, Guess
Page Count
205 pages
Identifiers
- ISBN-100871703300
- ISBN-139780871703309
- Goodreads2230962
- Library of Congress Control Number88071762
- OCLC Control Number19649434
and 1 more
- Open LibraryOL2067753M
Classifications
- DDC671.73
- LCCTS695.25 .C66 1988
Subjects
Topics
Other Editions
- Ion implantation and plasma assisted processes: proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Applications, Atlanta, Georgia, 22-25 May 1988
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