Author

Publication

1994-05-01 - Society of Photo Optical

Language

English

Word Count

138,250 words, Guess

Page Count

553 pages

Physical Format

Paperback

Identifiers

  • Open LibraryOL11392898M
  • ISBN-139780819414915
  • ISBN-100819414913
  • OCLC Control Number30416514
  • Library of Congress Control Number94065791

Subjects

Other Editions

  • Integrated Circuit Metrology Inspection and Process Control Viii/V 2196PaperbackSociety of Photo Optical1994-05-01

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