Author

Contributions

  • United States. Defense Advanced Research Projects Agency. - Contributor
  • National Science Foundation (U.S.) - Contributor

Publication

1979 - U.S. Dept. of Commerce, National Bureau of Standards : for sale by the Supt. of Docs., U.S. Govt. Print. Off., Washington, District of Columbia

Language

English

Word Count

10,500 words, Guess

Page Count

42 pages

Identifiers

Classifications

  • DDC602/.1 s
  • LCCQC100 .U57 no. 400-47

Subjects

Topics

Series Statement

  • Semiconductor measurement technology

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