Harry J. Levinson

Identifiers

Open LibraryOL237959A

Top Subjects

Microlithography (3)
Integrated circuits (2)
Microlithography -- Quality control (1)
Semiconductors -- Etching (1)
Integrated circuits -- Design and construction (1)
Optics (1)
Science (1)

Books by Harry J. Levinson

Total count: 9

Lithography process control

SPIE Optical Engineering Press1999-01-01
Principles of lithography

SPIE Press2001-01-01
Principles of Lithography (SPIE PRESS Monograph Vol. PM97) (Spie Press Monograph)

SPIE-International Society for Optical Engine2001-07-01
Optical microlithography XXI26-29 February 2008, San Jose, California, USA

SPIE2008-01-01
Optical microlithography XXI26-29 February 2008, San Jose, California, USA

SPIE2008-01-01
Optical microlithography XXII24-27 February 2009, San Jose, California, United States

SPIE2009-01-01
Principles of Lithography, 3rd Ed

SPIE2010-01-01
Principles of Lithography, Third Edition (SPIE Press Monograph, Vol. PM198)

SPIE Press2011-01-21
Extreme Ultraviolet LithographyPm326

SPIE2020-01-01