J. W. Coburn

Born 1932-01-01

Identifiers

Open LibraryOL1462203A

Top Subjects

Plasma etching (1)
Semiconductors -- Etching (1)
Congresses (1)
Plasma engineering (1)
Physical Properties Of Materials (1)

Books by J. W. Coburn

Total count: 2

Plasma etching and reactive ion etching

American Institute of Physics1982-01-01
Plasma ProcessingSymposium Held April 15-18, 1986, Palo Alto, California, USA (Materials Research Soc Symposia Proceedings, Vol 68)

Materials Research Society1986-07-01