Plasma processing
symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
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Author
Contributions
- Coburn, J. W., 1932- - Contributor
- Gottscho, R. A. - Contributor
- Hess, Dennis W. - Contributor
- Materials Research Society. - Contributor
Publication
1986 - Materials Research Society, Pittsburgh, Pa, Pennsylvania
Language
English
Word Count
115,750 words, Guess
Page Count
463 pages
Identifiers
- Open LibraryOL2722737M
- ISBN-100931837340
- OCLC Control Number13795753
- OCLC Control Numberisbn_0931837340
- Library of Congress Control Number86016292
and 1 more
- Goodreads3982693
Classifications
- DDC621.044
- LCCTA2005 .P534 1986
Subjects
Series Statement
- Materials Research Society symposia proceedings,
Other Editions
- Plasma processing: symposium held April 15-18, 1986, Palo Alto, California, U.S.A.
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