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Christopher L. Borst
Identifiers
Open Library
OL5417567A
Top Subjects
Grinding and polishing (1)
Interconnects (Integrated circuit technology) (1)
Semiconductors -- Polishing (1)
Books by Christopher L. Borst
Total count: 1
Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
fundamental mechanisms and application to IC interconnect technology
Kluwer Academic Publishers
2002-01-01
