Contributions

  • Gill, William N. - Contributor
  • Gutmann, Ronald J. - Contributor

Publication

2002 - Kluwer Academic Publishers, Boston, Massachusetts

Language

English

Word Count

57,250 words, Guess

Page Count

229 pages

Identifiers

  • ISBN-101402071930
  • ISBN-139781402071935
  • Goodreads3013313
  • Library of Congress Control Number2002028782
  • Better World Books9781402071935
and 1 more

Classifications

  • LCCTK7874.53 .B67 2002
  • LCCTS1-2301

Subjects

Other Editions

  • Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glassesKluwer Academic Publishers2002

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