Sputtering

Angle of incidence dependence of light ion physical sputtering of carbon

A. A. Haasz, J. W. Davis and C. H. Wu.

Plasma-assisted physical vapor deposition surface treatments for tribological control

Talivaldis Spalvins.

Band-gap engineering in sputter deposited amorphous/microcrystalline ScxGa1-xN

Mark E. Little, Martin E. Kordesch.

Mixed composition materials suitable for vacuum web sputter coating

Bruce A. Banks ... [et al.].

Rolling contact fatigue of surface modified 440C using a "GE-polymet" type disc rod test rig

by Robert L. Thom.

Low-energy sputtering research

P.K. Ray and V. Shutthanandan.

Energy dependence of the yields of ion-induced sputtering of monatomic solids

Noriaki Matsunami ... (et al.).

Sputtering threshold energies of heavy ions

Maris A. Mantenieks.

Sputtering, phenomena in ion thrusters: final report

Raymond S. Robinson and Stephen M. Rossnagel.

Final report to NASA Marshall Space Flight Center on the study of low temperature unbalanced magnetron deposition of hard, wear-resistant coatings for liquid-film bearing applications