Energy dependence of the yields of ion-induced sputtering of monatomic solids
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Author
Contributions
- Matsunami, N 1949- - Contributor
Publication
1983 - Institute of Plasma Physics, Nagoya University, Nagoya, Japan, Japan
Language
English
Subjects
Topics
SputteringSputtering (Physics) -- Charts, diagrams, etc
Series Statement
- "IPPJ-AM-32."
- IPPJ-AM reports -- 32.
Other Editions
- Energy dependence of the yields of ion-induced sputtering of monatomic solids
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