Advances in Resist Technology and Processing VII
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Word Count
148,750 words, Guess
Page Count
595 pages
Physical Format
Paperback
Identifiers
- Open LibraryOL11392659M
- ISBN-139780819403094
- ISBN-100819403091
- OCLC Control Number508158024
- Library of Congress Control Number90060892
Subjects
Topics
Series Statement
- Spie Proceedings, Vol 1262
Other Editions
- Advances in Resist Technology and Processing VII
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