Optical Lithography

Integrated circuit fabrication technology

by David J. Elliott.

Advances in Resist Technology and Processing VII

Michael P. C. Watts

Advances in Resist Technology and Processing VIII: Proceedings, 4-5 March 1991 San Jose, California (Spie Proceedings Series, Vol 1466)

Hiroshi Ito

Advances in Resist Technology and Processing VI

Elsa Reichmanis

Electron-beam, X-ray, and ion-beam technology: submicrometer lithographies IX : 7-8 March 1990, San Jose, California

Douglas J. Resnick, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.

Optical/Laser Microlithography V: 11-13 March 1992 San Jose, California (Spie Proceedings, Vol 1674)

John D. Cuthbert

Advances in Resist Technology and Processing IX: 9-10 March 1992 San Jose, California (Proceedings of S P I E)

Anthony E. Novembre

Advances in Resist Technology and Processing III (Spie Volume 631)

C. Grant Willson

Vsli Electronics Microstructure Science: Lithography for Vlsi (VLSI electronics)

Norman G. Einspruch

Advances in resist technology and processing IV: 2-3 March 1987, Santa Clara, California

Murrae J. Bowden, chair/editor.