Advances in Resist Technology and Processing IX
9-10 March 1992 San Jose, California (Proceedings of S P I E)
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Author
Publication
1992-06-01 - SPIE-International Society for Optical Engine
Language
English
Word Count
171,000 words, Guess
Page Count
684 pages
Physical Format
Paperback
Identifiers
- Open LibraryOL11392772M
- ISBN-139780819408273
- ISBN-100819408271
- OCLC Control Number29380105
- OCLC Control Number28985230
and 1 more
- Library of Congress Control Number91061057
Classifications
- LCC
Subjects
Other Editions
- Advances in Resist Technology and Processing IX
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