Advances in Resist Technology and Processing VI
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Word Count
155,000 words, Guess
Page Count
620 pages
Physical Format
Paperback
Identifiers
- Open LibraryOL11392592M
- ISBN-139780819401212
- ISBN-100819401218
- OCLC Control Number20997219
- Library of Congress Control Number89060656
and 1 more
- Goodreads6210562
Subjects
Series Statement
- Spie Proceedings, Vol 1086
Other Editions
- Advances in Resist Technology and Processing VI
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