Interconnect and contact metallization for ULSI
proceedings of the international symposium
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Author
Contributions
- Mathad, G. S. - Contributor
- Rathore, Harzara S. - Contributor
- Arita, Y. - Contributor
Publication
2000 - Electrochemical Society, Pennington, N.J, New Jersey
Language
English
Word Count
85,000 words, Guess
Page Count
340 pages
Identifiers
- Open LibraryOL6798373M
- ISBN-101566772540
- OCLC Control Number44929062
- OCLC Control Numberinterconnectcont0000unse
- Library of Congress Control Number00103066
Classifications
- DDC621.39/5
- LCCTK7874.76 .I54 2000
Subjects
Topics
Genres
- Congresses.
Series Statement
- Proceedings ;
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