Mary Maher, Jung-Chih Ann Chiao, Paul Resnick

Micromachining and Microfabrication Process Technology XIII

22-23 January 2008, San Jose, California, USA

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Author

Publication

2008 - SPIE

Language

English

Word Count

37,500 words, Guess

Page Count

150 pages

Identifiers

ISBN-139780819470577
ISBN-100819470570
Library of Congress Control Number2010455194
Better World Books9780819470577
Open LibraryOL28439803M

Classifications

LCCTJ1191.5.M55243234
LCCTJ1191.5 .M55243234 2008

Subjects

Topics

Congresses Micromachining Microfabrication Design and construction Electromechanical devices Microelectromechanical systems Miniature electronic equipment

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