Instrumentation, metrology, and standards for nanomanufacturing IV
2-4 August 2010, San Diego, California, United States
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Author
Contributions
- SPIE (Society) - Contributor
Publication
2010 - SPIE, Bellingham, Wash, Washington (State)
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- ISBN-139780819482631
- ISBN-100819482633
- Library of Congress Control Number2011289135
- OCLC Control Number700942544
- Open LibraryOL24886646M
Classifications
- DDC620.1/15
- LCCTA418.9.N35 I5683 2010
Series Statement
- Proceedings of SPIE -- v. 7767
- Proceedings of SPIE--the International Society for Optical Engineering -- v. 7767.
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