Micromachining and microfabrication process technology XV
26 January 2010, San Francisco, California, United States
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Author
Contributions
- SPIE (Society) - Contributor
Publication
2010 - SPIE, Bellingham, Wash, Washington (State)
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- ISBN-100819479861
- ISBN-139780819479860
- Library of Congress Control Number2010459436
- OCLC Control Number642829935
- Better World Books9780819479860
and 1 more
- Open LibraryOL24498476M
Classifications
- LCCTJ1191.5 .M55243235 2010
- LCCTJ1191.5.M55243235
Alternate Titles
- Micromachining and microfabrication process technology 15
- Micromachining and microfabrication process technology fifteen
Subjects
Series Statement
- Proceedings of SPIE -- v. 7590
- Proceedings of SPIE--the International Society for Optical Engineering -- v. 7590.
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