Contributions

  • SPIE (Society) - Contributor

Publication

2010 - SPIE, Bellingham, Wash, Washington (State)

Language

English

Word Count

0 words, Guess

Page Count

0 pages

Identifiers

  • ISBN-100819479861
  • ISBN-139780819479860
  • Library of Congress Control Number2010459436
  • OCLC Control Number642829935
  • Better World Books9780819479860
and 1 more

Classifications

  • LCCTJ1191.5 .M55243235 2010
  • LCCTJ1191.5.M55243235

Alternate Titles

  • Micromachining and microfabrication process technology 15
  • Micromachining and microfabrication process technology fifteen

Subjects

Series Statement

  • Proceedings of SPIE -- v. 7590
  • Proceedings of SPIE--the International Society for Optical Engineering -- v. 7590.

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