Advanced metallization for ULSI applications
proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan
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Author
Contributions
- Rana, Virendra Vir Singh. - Contributor
- Joshi, Rajiv V. - Contributor
- Ohdomari, I. - Contributor
- University of California, Berkeley. Continuing Education in Engineering. - Contributor
Publication
1992 - Materials Research Society., Pittsburgh, Pennsylvania
Language
English
Word Count
145,000 words, Guess
Page Count
580 pages
Identifiers
- Open LibraryOL1331754M
- ISBN-101558991522
- ISBN-139781558991521
- Goodreads4932728
- Library of Congress Control Number92213162
Classifications
- DDC621.39/5
- LCCTK7871.15.T85 A38 1991
Subjects
Topics
Other Editions
- Advanced metallization for ULSI applications
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