Instrumentation, metrology, and standards for nanomanufacturing, optics, and semiconductors V
24-25 August 2011, San Diego, California, United States
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Contributions
- SPIE (Society) - Contributor
- National Institute of Standards and Technology (U.S.) - Contributor
Publication
2011 - SPIE, Bellingham, Wash, Washington (State)
Language
English
Word Count
0 words, Guess
Page Count
0 pages
Identifiers
- ISBN-100819487155
- ISBN-139780819487155
- Library of Congress Control Number2012360868
- OCLC Control Number773740910
- Open LibraryOL25271424M
Classifications
- LCCTA418.9.N35 I5684 2011
- LCCQC371 .S67 v. 8105
Alternate Titles
- Instrumentation, metrology, and standards for nanomanufacturing IV.
Subjects
Series Statement
- Proceedings of SPIE -- v. 8105
- Proceedings of SPIE--the International Society for Optical Engineering -- v. 8105.
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