Handbook of semiconductor interconnection technology
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Author
Contributions
- Schwartz, G. C. - Contributor
- Srikrishnan, K. V., 1948- - Contributor
- Bross, Arthur, 1928- - Contributor
Publication
1998 - Marcel Dekker, New York, New York (State)
Language
English
Word Count
144,250 words, Guess
Page Count
577 pages
Identifiers
- Open LibraryOL691561M
- ISBN-100824799666
- OCLC Control Number37755150
- OCLC Control Numberhandbooksemicond00schw
- Library of Congress Control Number97038710
and 1 more
- Goodreads3617241
Classifications
- DDC621.3815/2
- LCCTK7871.85 .H333 1998
Alternate Titles
- Semiconductor interconnection technology
Description
This invaluable reference offers the latest information on the application of interconnection technology to semiconductors - covering materials, processes, equipment, methodologies, characterization techniques, clean room practices, and ways to control contamination-related defects.
Subjects
Topics
Other Editions
- Handbook of semiconductor interconnection technology
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