Microlithography
science and technology
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Author
Publication
1998 - Marcel Dekker, New York, New York (State)
Language
English
Word Count
195,000 words, Guess
Page Count
780 pages
Identifiers
- ISBN-100585139334
- ISBN-139780585139333
- OCLC Control Number44960707
- Open LibraryOL45477175M
Classifications
- DDC621.3815/31
- LCCTK7836 .M525 1998eb
Subjects
Topics
MasksMasquesMechanicalFabricationMicrolithographyMicrolithographieCircuits intégrésIntegrated circuitsMOS complémentairesIndustrial applicationsDesign and constructionManufacturing processesTECHNOLOGY & ENGINEERINGConception et constructionApplications industriellesComplementary Metal oxide semiconductors
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