Microlithographie

Fundamental Principles of Optical Lithography: The Science of Microfabrication

Chris Mack

Introduction to microlithography: theory, materials, and processing

L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.

Lithography process control

Harry J. Levinson.

Microlithography: science and technology

edited by Kazuaki Suzuki, Bruce W. Smith.

Electronic and photonic applications of polymers

Murrae J. Bowden, editor, S. Richard Turner, editor.

Handbook of VLSI microlithography: principles, technology, and applications

[edited] by John Helbert.

Microlithography: Science and Technology

Bruce W. Smith, Kazuaki Suzuki

Microlithography fundamentals in semiconductor devices and fabrication technology

Saburo Nonogaki, Takumi Ueno, Toshio Ito.

Principles of lithography

Harry J. Levinson.

Microlithography: science and technology

edited by James R. Sheats, Bruce W. Smith