Introduction to microlithography
theory, materials, and processing
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Contributions
- Thompson, L. F., 1944- - Contributor
- Willson, C. G. 1939- - Contributor
- Bowden, M. J., 1943- - Contributor
- American Chemical Society. Division of Organic Coatings and Plastics Chemistry. - Contributor
- American Chemical Society. Meeting - Contributor
Publication
1983 - The Society, Washington, D.C, District of Columbia
Language
English
Word Count
90,750 words, Guess
Page Count
363 pages
Identifiers
- Internet Archiveintroductiontomi0000thom
- Internet Archiveintroductiontomi1983thom
- Internet Archiveintroductiontomi1983thom_300
- ISBN-100841207755
- ISBN-139780841207752
and 4 more
- Goodreads5736173
- Library of Congress Control Number83005968
- OCLC Control Number9371344
- Open LibraryOL3164086M
Classifications
- DDC621.3815/31
- LCCTR940 .I57 1983
Subjects
Topics
Series Statement
- ACS symposium series,
- 219
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