Contributions

  • Ueno, Takumi, 1951- - Contributor
  • Ito, Toshio, 1952- - Contributor

Publication

1998 - Marcel Dekker, New York, New York (State)

Language

English

Word Count

81,750 words, Guess

Page Count

327 pages

Identifiers

and 2 more
  • Goodreads4032470
  • LibraryThing8796858

Classifications

  • DDC621.3815/2
  • LCCTK7871.85 .N66 1998

Description

Ranging from the basic principles to the forefront of microlithography, this unique volume explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing.

Subjects

Topics

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