Mary Ann Perez-Maher, Jung-Chih Chiao, Paul J. Resnick

Micromachining and microfabrication process technology XIV

27 January 2009, San Jose, California, United States

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Author

Contributions

SPIE (Society) - Contributor
Texas Instruments Incorporated - Contributor

Publication

2009 - SPIE, Bellingham, Wash, Washington (State)

Language

English

Word Count

0 words, Guess

Page Count

0 pages

Identifiers

ISBN-100819474509
ISBN-139780819474506
Library of Congress Control Number2010287958
OCLC Control Number318214136
Open LibraryOL31161485M

Classifications

LCCQC176.8.M5 M525 2009

Alternate Titles

Micromachining and microfabrication process technology 14
Micromachining and microfabrication process technology fourteen

Subjects

Topics

Congresses Micromachining Microfabrication Design and construction Electromechanical devices Miniature electronic equipment

Series Statement

Proceedings of SPIE -- v. 7204
Proceedings of SPIE--the International Society for Optical Engineering -- v. 7204.

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