Integrated circuit metrology, inspection, and process control VII
2-4 March 1993, San Jose California
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Author
Contributions
- Postek, Michael T. - Contributor
- Society of Photo-optical Instrumentation Engineers. - Contributor
Publication
1993 - SPIE, Bellingham, Wash, Washington (State)
Language
English
Word Count
148,500 words, Guess
Page Count
594 pages
Identifiers
- ISBN-100819411604
- ISBN-139780819411600
- Goodreads5441739
- OCLC Control Number28715733
- Open LibraryOL20908429M
Classifications
- LCCTK7874 .I516 1991
Subjects
Series Statement
- Proceedings of SPIE--the International Society for Optical Engineering -- v. 1926
Other Editions
- Integrated circuit metrology, inspection, and process control VII
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