Advanced metallization and interconnect systems for ULSI applications in 1997
proceedings of the conference held September 30-October 2,1997, in San Diego, California, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A., a parallel session of the conference was held from October 21-22, 1997, in Tokyo, Japan
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Author
Contributions
- Cheung, Robin. - Contributor
- University of California, Berkeley. Continuing Education in Engineering. - Contributor
Publication
1998 - Materials Research Society, Warrendale, Pa, Pennsylvania
Language
English
Subjects
Topics
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