1996 1st International Symposium on Plasma Process-Induced Damage
13-14 May 1996, Santa Clara, California, USA
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Contributions
- Cheung, Kin P. - Contributor
- Nakamura, Moritaka. - Contributor
- Gabriel, Calvin T. - Contributor
- IEEE Electron Devices Society. - Contributor
- American Vacuum Society. - Contributor
and 1 more
- Ōyō Butsuri Gakkai. - Contributor
Publication
1996 - Northern California Chapter of the American Vacuum Society, Sunnyvale, CA, California
Language
English
Word Count
59,250 words, Guess
Page Count
237 pages
Identifiers
- Open LibraryOL1015683M
- ISBN-100965157709
- OCLC Control Number35121812
- Library of Congress Control Number96068444
- Goodreads4884930
Classifications
- DDC621.3815/2
- LCCTK7871.85 .I5834 1996
Subjects
Topics
Other Editions
- 1996 1st International Symposium on Plasma Process-Induced Damage: 13-14 May 1996, Santa Clara, California, USA
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