Author

Contributions

  • Yen, Anthony. - Contributor
  • Society of Photo-optical Instrumentation Engineers. - Contributor
  • Semiconductor Equipment and Materials International. - Contributor
  • International SEMATECH. - Contributor

Publication

2003 - SPIE, Bellingham, Wash., USA, Washington (State)

Language

English

Word Count

441,000 words, Guess

Page Count

1,764 pages

Identifiers

  • ISBN-100819448451
  • ISBN-139780819448453
  • Goodreads3620312
  • Library of Congress Control Number2004296396
  • OCLC Control Number52636014
and 2 more
  • Better World Books9780819448453
  • Open LibraryOL3323613M

Classifications

  • DDC621.3815/31
  • LCCTK7872.M3 O685 2004
  • LCCTK7872.M3.O685 2004
and 1 more
  • LCCTK7835 .O664 2003

Alternate Titles

  • Optical microlithography sixteen
  • Optical Microlithography 16

Subjects

Genres

  • Congresses

Series Statement

  • SPIE proceedings series,
  • v. 5040
  • Proceedings of SPIE--the International Society for Optical Engineering ;

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