Dry etching for microelectronics
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Author
Contributions
- Powell, Ronald A. - Contributor
Publication
1984 - Distributors for the USA and Canada, Elsevier Science Pub. Co., Amsterdam, Netherlands
Language
English
Word Count
74,750 words, Guess
Page Count
299 pages
Identifiers
- ISBN-100444869050
- ISBN-139780444869050
- Library of Congress Control Number84001145
- OCLC Control Number10913832
- Open LibraryOL2839348M
Classifications
- DDC621.381/73
- LCCTK7871.85 .D79 1984
Subjects
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