Electrochemical processing in ULSI fabricatrion III
proceedings of the International Symposium
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Contributions
- Andricacos, Panayotis C., 1951- - Contributor
- Electrochemical Society. Electrodeposition Division. - Contributor
- Electrochemical Society. Dielectric Science and Technology Division. - Contributor
- Electrochemical Society. Electronics Division. - Contributor
- Electrochemical Society. Meeting - Contributor
Publication
2002 - Electrochemical Society, Pennington, N.J, New Jersey
Language
English
Word Count
64,500 words, Guess
Page Count
258 pages
Identifiers
- ISBN-101566772737
- ISBN-139781566772730
- Open LibraryOL22025705M
Subjects
Topics
MaterialsCongressesDielectricsSemiconductorsElectric contactsIntegrated circuitsDesign and constructionDielectrics -- CongressesElectrochemical metallizingUltra large scale integrationElectric contacts -- CongressesElectrochemical metallizing -- CongressesSemiconductors -- Design and construction -- CongressesIntegrated circuits -- Ultra large scale integration -- Materials -- CongressesIntegrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
Genres
- Congresses
Series Statement
- Proceedings -- v. 2000-8
- Proceedings (Electrochemical Society) -- v.2000-8.
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