Introduction to microlithography
2nd ed.
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Contributions
- Thompson, L. F., 1944- - Contributor
- Willson, C. G. 1939- - Contributor
- Bowden, M. J., 1943- - Contributor
Publication
1994 - American Chemical Society, Washington, DC, District of Columbia
Language
English
Word Count
131,750 words, Guess
Page Count
527 pages
Identifiers
- Open LibraryOL1430612M
- ISBN-100841228485
- OCLC Control Number29359317
- Library of Congress Control Number93042023
- Goodreads1409153
Classifications
- DDC621.3815/31
- LCCTR940 .I57 1994
- LCCTR940.I57 1994
Subjects
Series Statement
- ACS professional reference book
Other Editions
- Introduction to microlithography
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