Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
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Author
Contributions
- Perkowitz, S. - Contributor
- Seiler, David G. - Contributor
- National Institute of Standards and Technology (U.S.) - Contributor
Publication
1995 - U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology, Gaithersburg, MD, Maryland
Language
English
Word Count
12,750 words, Guess
Page Count
51 pages
Physical Format
Microform
Identifiers
- OCLC Control Number37207896
- Open LibraryOL17806078M
Subjects
Topics
Places
Series Statement
- NIST special publication -- 400-98.
- Semiconductor measurement technology
Other Editions
- Survey of optical characterization methods for materials, processing, and manufacturing in the semiconductor industry
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