Contributions

  • National Institute of Standards and Technology (U.S.). Semiconductor Electronics Division. - Contributor

Publication

1993 - U.S. Dept. of Commerce, National Institute of Standards and Technology, Gaithersburg, MD, Maryland

Language

English

Word Count

52,750 words, Guess

Page Count

211 pages

Physical Format

Microform

Identifiers

Alternate Titles

  • Evolution of silicon materials characteristics, lessons learned for improved manufacturing.

Subjects

Topics

SemiconductorsIntegrated circuitsSemiconductor wafersWafer-scale integrationIntegrated circuits -- Wafer-scale integration -- United States

Places

Series Statement

  • NIST special publication -- 400-92.

Other Editions

  • Semiconductor measurement technology: evolution of silicon materials characterization : lessons learned for improved manufacturingMicroformU.S. Dept. of Commerce, National Institute of Standards and Technology1993-01-01

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